Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE46628 | Pattern forming method | — | 2017-12-12 |
| 9633862 | Semiconductor manufacturing apparatus and semiconductor manufacturing method | Atsushi Kubota | 2017-04-25 |
| 9595472 | Semiconductor device, and manufacturing method of semiconductor device | Takuya Ohtsuki | 2017-03-14 |