Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841385 | Pattern characteristic-detection apparatus for photomask and pattern characteristic-detection method for photomask | Hiromu Inoue, Hiroyuki Ikeda | 2017-12-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841385 | Pattern characteristic-detection apparatus for photomask and pattern characteristic-detection method for photomask | Hiromu Inoue, Hiroyuki Ikeda | 2017-12-12 |