Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709494 | Measuring arrangement for measuring optical properties of a reflective optical element, in particular for microlithography | Hans-Juergen Rostalski | 2017-07-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709494 | Measuring arrangement for measuring optical properties of a reflective optical element, in particular for microlithography | Hans-Juergen Rostalski | 2017-07-18 |