Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9543157 | Method for processing a carrier, a method for operating a plasma processing chamber, and a method for processing a semiconductor wafer | Lothar Brencher | 2017-01-10 |
MR
Michael Renner
Overall (2017): #304,524 of 506,227Top 65%
1
Patents 2017