Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9607803 | High throughput cooled ion implantation system and method | Joseph Ferrara, Brian Terry | 2017-03-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9607803 | High throughput cooled ion implantation system and method | Joseph Ferrara, Brian Terry | 2017-03-28 |