Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9834660 | Rare earth metal complexes that excite in the long UV wavelength range | Thomas Potrawa | 2017-12-05 |
| 9642235 | EUV radiation generating device including a beam influencing optical unit | Martin Lambert | 2017-05-02 |