Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9721790 | Method for making enhanced semiconductor structures in single wafer processing chamber with desired uniformity control | Robert J. Mears, Robert John Stephenson | 2017-08-01 |
| 9558939 | Methods for making a semiconductor device including atomic layer structures using N2O as an oxygen source | Robert John Stephenson | 2017-01-31 |