Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778022 | Determining moving properties of a target in an extreme ultraviolet light source | Jesse Quinn Odle, Cèsar Fernandez-Espasa | 2017-10-03 |
| 9546901 | Minimizing grazing incidence reflections for reliable EUV power measurements having a light source comprising plural tubes with centerlines disposed between a radiation region and corresponding photodetector modules | Michael A. Purvis, Jie Ding | 2017-01-17 |