Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823586 | Inspection apparatus, inspection method and manufacturing method | — | 2017-11-21 |
| 9632424 | Illumination source for use in inspection methods and/or lithography; inspection and lithographic apparatus and inspection method | — | 2017-04-25 |
| 9563131 | Lithographic apparatus, substrate and device manufacturing method | — | 2017-02-07 |