Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9715182 | Lithographic apparatus, substrate support system, device manufacturing method and control program | Marinus Maria Johannes Van De Wal, Wilhelmus Henricus Theodorus Maria Aangenent, Khalid Manssouri | 2017-07-25 |