Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798225 | Method of characterizing, method of forming a model, method of simulating, mask manufacturing method and device manufacturing method | Eelco Van Setten, Eleni Psara, Anton Bernhard Van Oosten | 2017-10-24 |