Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9826616 | Extreme ultraviolet light source utilizing a target of finite extent | Yezheng Tao, Jordan Jur, Daniel J. W. Brown | 2017-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9826616 | Extreme ultraviolet light source utilizing a target of finite extent | Yezheng Tao, Jordan Jur, Daniel J. W. Brown | 2017-11-21 |