Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9606458 | Method for calibration of an encoder scale and a lithographic apparatus | Andre Bernardus Jeunink, Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Michael Jozef Mathijs Renkens, Carolus Johannes Catharina Schoormans +1 more | 2017-03-28 |