Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811001 | Method and apparatus for inspection and metrology | Peter Danny Van Voorst, Duygu Akbulut, Koos Van Berkel, Jeroen Johan Maarten Van De Wijdeven | 2017-11-07 |
| 9748522 | Illumination system comprising beam shaping element | Coen Adrianus Verschuren | 2017-08-29 |