Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9594299 | Method of determining focus, inspection apparatus, patterning device, substrate and device manufacturing method | Paul Christiaan Hinnen, Shu-jin Wang, Kuo-Feng PAO | 2017-03-14 |