Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9790595 | Method and system to reduce outgassing in a reaction chamber | Sung Hoon Jung, Eric Jen Cheng Liu, Mike Schmotzer | 2017-10-17 |
| 9711350 | Methods for semiconductor passivation by nitridation | Qi Xie, Fu Tang, Michael Eugene Givens, Jan Willem Maes | 2017-07-18 |
| 9558931 | System and method for gas-phase sulfur passivation of a semiconductor surface | Fu Tang, Michael Eugene Givens, Qi Xie | 2017-01-31 |