Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711345 | Method for forming aluminum nitride-based film by PEALD | — | 2017-07-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711345 | Method for forming aluminum nitride-based film by PEALD | — | 2017-07-18 |