Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9702041 | Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus | Seok-Jun Won, Yong Min Yoo, Young-Hoon Kim, Dae-Jin Kwon, Weon-Hong Kim | 2017-07-11 |
| 9679750 | Deposition apparatus | Young Seok Choi | 2017-06-13 |
| D787458 | Gas supply plate for semiconductor manufacturing apparatus | Hie Chul Kim, Hyun Soo Jang | 2017-05-23 |
| 9567672 | Deposition apparatus and cleansing method using the same | Sang Jin Jeong, Hyun Soo Jang, Young-Hoon Kim, Jeong Ho Lee | 2017-02-14 |
| 9564311 | Method of depositing thin film | Young-Hoon Kim, Sang Wook Lee | 2017-02-07 |