Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9772629 | Methods for monitoring a flow controller coupled to a process chamber | Balarabe Mohammed, John W. Lane, Dan Joseph Healy | 2017-09-26 |
| 9644796 | Methods for in-situ calibration of a flow controller | Balarabe Mohammed, John W. Lane, Dan Joseph Healy | 2017-05-09 |