Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9691650 | Substrate transfer robot with chamber and substrate monitoring capability | Shinichi Kurita, Takayuki Matsumoto, Suhail Anwar | 2017-06-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9691650 | Substrate transfer robot with chamber and substrate monitoring capability | Shinichi Kurita, Takayuki Matsumoto, Suhail Anwar | 2017-06-27 |