Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9548200 | Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications | Ke Chang, Yueh Sheng Ow, Ananthkrishna Jupudi, Glen T. Mori, Aksel Kitowski +1 more | 2017-01-17 |