Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9601396 | 3D NAND staircase CD control by using interferometric endpoint detection | — | 2017-03-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9601396 | 3D NAND staircase CD control by using interferometric endpoint detection | — | 2017-03-21 |