Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711381 | Methods and apparatus for post-chemical mechanical planarization substrate cleaning | Sen-Hou Ko | 2017-07-18 |
| 9646859 | Disk-brush cleaner module with fluid jet | Hui Chen, Allen L. D'Ambra, Sen-Hou Ko, Yufei Chen, Adrian Blank +2 more | 2017-05-09 |