Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779956 | Hydrogen activated atomic layer etching | Xin Zhang, Alan J. Jensen, Daniel Le | 2017-10-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779956 | Hydrogen activated atomic layer etching | Xin Zhang, Alan J. Jensen, Daniel Le | 2017-10-03 |