Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9839109 | Dynamic control band for RF plasma current ratio control | — | 2017-12-05 |
| 9595423 | Frequency tuning for dual level radio frequency (RF) pulsing | Valentin N. Todorow | 2017-03-14 |