Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9764946 | MEMs device with outgassing shield | Li Chen, Kuang L. Yang | 2017-09-19 |
| 9556017 | Apparatus and method for preventing stiction of MEMS devices encapsulated by active circuitry | Li Chen, Kuang L. Yang | 2017-01-31 |