Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9664704 | Drive and compensation circuit for capacitive MEMs structures | Stefan Rombach, Maximilian Marx | 2017-05-30 |
| 9535084 | Method for the decoupled control of the quadrature and the resonance frequency of a micro-mechanical rotation rate sensor by means of sigma-delta-modulation | Markus Egretzberger, Andreas Kugi, Florian Mair, Michael Maurer, Thomas Northemann | 2017-01-03 |