Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9627319 | Semiconductor device and semiconductor device manufacturing method using patterning and dry etching | Koji Hara, Nobutaka Ukigaya, Takeshi Aoki, Junya Tamaki, Norihiko Nakata +1 more | 2017-04-18 |