SL

Steven Tianxiao Lee

AE Advanced Micro-Fabrication Equipment: 1 patents #2 of 20Top 10%
Overall (2017): #231,949 of 506,227Top 50%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9696209 Method for measuring temperature of film in reaction chamber Lu Chen, Chaoqian Zhang, Yanzhong Ma, Yousen Li, Zhehao Chen 2017-07-04