Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9617633 | Coating packaged chamber parts for semiconductor plasma apparatus | Xiaoming He, Lei Wan, Zhaoyang Xu, Ping-Jung Yang | 2017-04-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9617633 | Coating packaged chamber parts for semiconductor plasma apparatus | Xiaoming He, Lei Wan, Zhaoyang Xu, Ping-Jung Yang | 2017-04-11 |