Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9767988 | Method of controlling the switched mode ion energy distribution system | Daniel J. Hoffman, Daniel Carter | 2017-09-19 |
| 9685297 | Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system | Daniel Carter, Daniel J. Hoffman | 2017-06-20 |
| 9589767 | Systems, methods, and apparatus for minimizing cross coupled wafer surface potentials | Daniel J. Hoffman | 2017-03-07 |