Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711335 | System and method for balancing consumption of targets in pulsed dual magnetron sputtering (DMS) processes | — | 2017-07-18 |
| 9673028 | Arc management with voltage reversal and improved recovery | Hendrik Walde, Joshua Brian Pankratz, Brian D. Kowal | 2017-06-06 |