Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417280 | System and method for analyzing voltage breakdown in electrostatic chucks | Scott E. Peitzsch | 2016-08-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417280 | System and method for analyzing voltage breakdown in electrostatic chucks | Scott E. Peitzsch | 2016-08-16 |