Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9360776 | Alignment correction method for substrate to be exposed, and exposure apparatus | Yoshiaki Nomura | 2016-06-07 |
| 9304391 | Exposure apparatus using microlens array and optical member | Michinobu Mizumura | 2016-04-05 |
| 9244311 | Photo-alignment exposure method and photo-alignment exposure device | Koichi Kajiyama, Kazushige Hashimoto | 2016-01-26 |