Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9480136 | Extreme UV radiation light source device | Yusuke Teramoto, Gota Niimi, Pieter Goldhoorn | 2016-10-25 |
| 9253865 | Method of calibrating a DPP-generated EUV light source | Sven Probst, Mohamad Hussein El-Husseini | 2016-02-02 |