Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484190 | Showerhead-cooler system of a semiconductor-processing chamber for semiconductor wafers of large area | — | 2016-11-01 |
| 9273393 | Torch system for depositing protective coatings on interior walls and recesses present on the flat surface of an object | — | 2016-03-01 |
| 9275840 | Method for providing uniform distribution of plasma density in a plasma treatment apparatus | — | 2016-03-01 |