Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478440 | Low-pressure chemical vapor deposition apparatus and thin-film deposition method thereof | Xunhui Wang, Qijun Guo, Jianchao Fan | 2016-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478440 | Low-pressure chemical vapor deposition apparatus and thin-film deposition method thereof | Xunhui Wang, Qijun Guo, Jianchao Fan | 2016-10-25 |