Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9383306 | Apparatus and a method for spectroscopic ellipsometry, in particular infrared spectroscopic ellipsometry | Klaus Koerner, Arnulf Roeseler, Daniel Claus | 2016-07-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9383306 | Apparatus and a method for spectroscopic ellipsometry, in particular infrared spectroscopic ellipsometry | Klaus Koerner, Arnulf Roeseler, Daniel Claus | 2016-07-05 |