Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443741 | Etching method for reducing microloading effect | Po-Wen Su, Cheng-Chang Wu, Hsin-Yu Hsieh, Shui-Yen Lu | 2016-09-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443741 | Etching method for reducing microloading effect | Po-Wen Su, Cheng-Chang Wu, Hsin-Yu Hsieh, Shui-Yen Lu | 2016-09-13 |