Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9330902 | Method for forming HfOx film based on atomic layer deposition (ALD) process | Tsai-Yu Wen, Shih-Cheng Chen, Tsuo-Wen Lu, Yu-Ren Wang | 2016-05-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9330902 | Method for forming HfOx film based on atomic layer deposition (ALD) process | Tsai-Yu Wen, Shih-Cheng Chen, Tsuo-Wen Lu, Yu-Ren Wang | 2016-05-03 |