Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490128 | Non-melt thin-wafer laser thermal annealing methods | Andrew M. Hawryluk, Xiaoru Wang, Xiaohua Shen | 2016-11-08 |
| 9401277 | Substrate processing with reduced warpage and/or controlled strain | Shaoyin Chen | 2016-07-26 |
| 9302348 | Ultrafast laser annealing with reduced pattern density effects in integrated circuit fabrication | Andrew M. Hawryluk | 2016-04-05 |