Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9318319 | Radical-enhanced atomic layer deposition using CF4 to enhance oxygen radical generation | Arthur W. Zafiropoulo | 2016-04-19 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9318319 | Radical-enhanced atomic layer deposition using CF4 to enhance oxygen radical generation | Arthur W. Zafiropoulo | 2016-04-19 |