Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9377286 | Device for globally measuring thickness of metal film | Dewen Zhao, Zilian Qu, Qian Zhao, Yongyong He, Yonggang Meng | 2016-06-28 |
| 9255780 | Method for measuring thickness of film on wafer edge | Pan Shen, Yongyong He | 2016-02-09 |