Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9299567 | Manufacturing method of MIS-type semiconductor device, including heating a zirconium oxynitride (ZrON) layer | Takahiro Sonoyama, Toru Oka, Junya Nishii | 2016-03-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9299567 | Manufacturing method of MIS-type semiconductor device, including heating a zirconium oxynitride (ZrON) layer | Takahiro Sonoyama, Toru Oka, Junya Nishii | 2016-03-29 |