Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9300229 | Electrostatic chuck | Takuma Wada | 2016-03-29 |
| 9252040 | Electrostatic chuck | Takuma Wada | 2016-02-02 |
| 9252041 | Electrostatic chuck | Takuma Wada | 2016-02-02 |
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9300229 | Electrostatic chuck | Takuma Wada | 2016-03-29 |
| 9252040 | Electrostatic chuck | Takuma Wada | 2016-02-02 |
| 9252041 | Electrostatic chuck | Takuma Wada | 2016-02-02 |