Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9492986 | Laminate and method for separating the same | Yasushi Fujii, Atsushi Matsushita, Koki Tamura, Atsushi Kubo | 2016-11-15 |
| 9484238 | Attachment method | Shigeru Kato, Yasumasa Iwata, Yasushi Fujii | 2016-11-01 |
| 9352542 | Processing method and processing apparatus | Atsuo Kajima, Takuma Hasegawa, Koki Tamura, Shigeru Yokoi | 2016-05-31 |
| 9337074 | Attaching device and attaching method | Shigeru Kato, Shugo Tsushima, Junichi Katsuragawa, Satoshi Kobari, Akihiko Nakamura | 2016-05-10 |
| 9308715 | Laminate and method for separating the same | Hirofumi Imai, Koki Tamura, Atsushi Kubo, Takahiro Yoshioka, Yasushi Fujii | 2016-04-12 |
| 9281225 | Substrate processing apparatus and substrate processing method | — | 2016-03-08 |
| 9272494 | Sticking apparatus and sticking method | Akihiko Nakamura, Shigeru Kato | 2016-03-01 |
| 9238357 | Supporting member separation apparatus and supporting member separation method | Shinji Takase, Akihiko Nakamura | 2016-01-19 |