Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494866 | Resist composition and method of forming resist pattern | Tsuyoshi Nakamura, Hiroaki Shimizu, Hideto Nito | 2016-11-15 |
| 9459528 | Negative tone resist composition for solvent developing and method of forming resist pattern | Tomohiro Oikawa, Rikita Tsunoda, Yusuke Suzuki | 2016-10-04 |
| 9411224 | Method of forming resist pattern | Tsuyoshi Nakamura, Hiroaki Shimizu, Masaru Takeshita, Hideto Nito, Hirokuni Saito | 2016-08-09 |
| 9405200 | Resist composition and method of forming resist pattern | Tsuyoshi Nakamura, Hiroaki Shimizu, Hideto Nito | 2016-08-02 |
| 9377685 | Resist composition and method of forming resist pattern | Hiroaki Shimizu, Tsuyoshi Nakamura, Hideto Nito | 2016-06-28 |