Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418863 | Method for etching etching target layer | Shin Hirotsu, Tomonori Miwa, Hiroshi Okada | 2016-08-16 |
| 9312105 | Method for etching insulation film | Akira Takahashi, Kei Nakayama, Shin Hirotsu | 2016-04-12 |