Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520309 | Substrate processing apparatus and substrate processing method | — | 2016-12-13 |
| 9406539 | Substrate transfer apparatus | — | 2016-08-02 |
| 9312153 | Substrate processing system, transfer module, substrate processing method, and method for manufacturing semiconductor element | — | 2016-04-12 |
| 9227320 | Transfer device and transfer method | Hisayoshi Ito | 2016-01-05 |
| 9230840 | Substrate transfer device for substrate processing system | — | 2016-01-05 |