Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9441291 | Method of depositing a film | Muneyuki OTANI | 2016-09-13 |
| 9368341 | Method of manufacturing a silicon oxide film | Tatsuya Tamura | 2016-06-14 |
| 9293321 | Method of manufacturing a silicon oxide film | Tatsuya Tamura, Takashi Chiba | 2016-03-22 |